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Development of Plasma Technology at the University of Malaya

Wong, C.S., and Moo, S.P., and Chew, A.C., and Lee, S., (1998) Development of Plasma Technology at the University of Malaya. Jurnal Fizik Malaysia, 19 (3). pp. 61-67. ISSN 0128-0333

Full text not available from this repository.

Affiliations

University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory["lib/metafield:join_corp_creators" not defined]University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory["lib/metafield:join_corp_creators" not defined]University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory["lib/metafield:join_corp_creators" not defined]University of Malaya. Faculty of Science. Dept. of Physics. Plasma Research Laboratory

Abstract

In this paper, programs carried out at the University of Malaya by the Plasma Reseach Group to develop four types of plasma technology will be reviewed. These are (1) plasma fusion; (2) pulsed plasma radiation/particle sources for x-ray microlithography and microscopy, for neutron interrogation of matter and for ion implantation; (3) RF inductively coupled plasma system for material processing; and (4) plasma ozonizer for water and waste treatments.

Item Type:Journal
Additional Information:This note was added by the search_and_modify.pl script.
Keywords:Plasma technology
Subjects:Q Science, Computer Science
ID Code:3466

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