title: A Planar-coil Inductively coupled Plasma System for Thin Film Deposition
creator: Ng, K.H.
creator: Liew, W.S.
creator: Roslan Mohd Nor,  
creator: Wong, C.S.
subject: Q Science, Computer Science
description: A RF planar coil inductively coupled plasma (ICP) system is set up for the purpose of thin film deposition. The system is powered by a 13.56 MHz, 550 W, 50 $\omega$ RF generator. The RF power is transferred to the plasma via a planar induction coil. The impedance matching unit consists of an air core step-down transformer and a tunable vacuum capacitor. The typical E to H mode transition distinctive to the ICP has been observed in Ar, H₂ and H₂-CH₄ admixture plasma. Plasma enhanced chemical vapor deposition (PECVD) of diamond-like carbon (DLC) film on silicon substrate is achieved using the system.
publisher: Malaysian Institute of Physics (IFM)
date: 2002
type: Journal
type: PeerReviewed
relation: http://eprints.ictp.it/201/
identifier: Ng, K.H. and Liew, W.S. and Roslan Mohd Nor, and Wong, C.S. (2002) A Planar-coil Inductively coupled Plasma System for Thin Film Deposition. Jurnal Fizik Malaysia, 23 (1-4). pp. 51-53. ISSN 0128-0333
relation: http://myais.fsktm.um.edu.my/988/